Chih Hsun Lin
at United Microelectronics Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Calibration, Metals, Nondestructive evaluation, Ultrasonics, Transmission electron microscopy, Aluminum, Picosecond phenomena, Acoustics, Semiconducting wafers, Chemical mechanical planarization

PROCEEDINGS ARTICLE | April 5, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Metrology, Diffractive optical elements, Inspection, Transmission electron microscopy, Scatterometry, Process control, Semiconducting wafers, Scatter measurement, Chemical mechanical planarization, Single crystal X-ray diffraction

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