Dr. Chih-Ming Lai
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (14)

SPIE Journal Paper | 1 October 2013
JBO Vol. 19 Issue 02
KEYWORDS: Optical coherence tomography, Fiber optics, Polarization, Phase modulation, Calibration, Mirrors, In vivo imaging, Birefringence, Signal to noise ratio, Interferometers

Proceedings Article | 19 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Optical lithography, Manufacturing, Inspection, Design for manufacturing, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Model-based design, Design for manufacturability

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Optical lithography, Data modeling, Silicon, Manufacturing, Design for manufacturing, Transistors, Field effect transistors, Critical dimension metrology, Instrument modeling

Proceedings Article | 13 April 2005
Proc. SPIE. 5690, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine IX
KEYWORDS: Optical imaging, Coherence imaging, Foam, Polarization, Birefringence, Tissues, Optical coherence tomography, Image segmentation, Collagen, In vitro testing

Proceedings Article | 1 September 2004
Proc. SPIE. 5452, Semiconductor Lasers and Laser Dynamics
KEYWORDS: Quantum wells, Continuous wave operation, Annealing, Gallium arsenide, Indium, Nitrogen, Laser damage threshold, Vertical cavity surface emitting lasers, Pulsed laser operation, Plasma

Showing 5 of 14 publications
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