Dr. Chih-Shang Liu
at Industrial Technology Research Institute
SPIE Involvement:
Publications (4)

PROCEEDINGS ARTICLE | September 26, 2016
Proc. SPIE. 9961, Reflection, Scattering, and Diffraction from Surfaces V
KEYWORDS: Microscopes, Reflectometry, Silicon, Thin films, Inspection, Critical dimension metrology, Reflectivity, Scanning electron microscopy, Reflection, Oxides

PROCEEDINGS ARTICLE | September 10, 2009
Proc. SPIE. 7432, Optical Inspection and Metrology for Non-Optics Industries
KEYWORDS: Liquid crystals, Polarization, Spectrographs, Polarizers, Hyperspectral imaging, LCDs, Data modeling, Refractive index, Collimation, Imaging systems

PROCEEDINGS ARTICLE | September 15, 2005
Proc. SPIE. 5907, Photonic Devices and Algorithms for Computing VII
KEYWORDS: Mode locking, Modulation, Fiber lasers, Modulators, Clocks, Optical amplifiers, Mirrors, Optical clocks, Nonlinear optics, Fiber amplifiers

PROCEEDINGS ARTICLE | February 6, 2004
Proc. SPIE. 5210, Ultrahigh- and High-Speed Photography, Photonics, and Videography
KEYWORDS: Mode locking, Modulation, Fiber lasers, Optical amplifiers, Modulators, High speed photography, Amplitude modulation, Polarization, Frequency modulation, Optical isolators

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