Dr. Chih-Tung Hsu Profile

Dr. Chih-Tung Hsu

at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (1)

Proceedings Article | 20 August 2004 Paper

An agile mask data preparation and writer dispatching approach

Chih-tung Hsu, Y. Chen, S. Hsin, Laurent Tuo, Steffen Schulze

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557739

KEYWORDS: Photomasks, Manufacturing, Databases, Inspection equipment, Computer aided design, Inspection, Optical proximity correction, Electronic design automation, Semiconductor manufacturing, Visualization

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