Prof. Chih-Wei Lai
Assistant Professor at Michigan State Univ
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 25, 2007
Proc. SPIE. 6641, Plasmonics: Metallic Nanostructures and Their Optical Properties V
KEYWORDS: Semiconductors, Gold, Surface plasmons, Nanoparticles, Metals, Luminescence, Electrons, Nanocrystals, Nanocomposites, Quenching (fluorescence)

PROCEEDINGS ARTICLE | July 21, 2000
Proc. SPIE. 3997, Emerging Lithographic Technologies IV
KEYWORDS: Mirrors, Scattering, Particles, Photons, Inspection, Interference (communication), Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Defect inspection

PROCEEDINGS ARTICLE | July 21, 2000
Proc. SPIE. 3997, Emerging Lithographic Technologies IV
KEYWORDS: Opacity, Metals, Error analysis, Printing, Process control, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | December 30, 1999
Proc. SPIE. 3873, 19th Annual Symposium on Photomask Technology
KEYWORDS: Multilayers, Scattering, Sensors, Scanners, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Signal detection, Defect inspection

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