Chijuan Li
at North China Research Institute
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 9, 2005
Proc. SPIE. 5635, Nanophotonics, Nanostructure, and Nanometrology
KEYWORDS: Optical components, Polishing, Glasses, Crystals, Surface roughness, Sapphire, Abrasives, Radium, Surface finishing, Chemical mechanical planarization

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