We proposed a fabrication method of a sub-micron gap liquid chromatography micro chip by Silicon micromachining
technology and performed a principle confirmation using this chip. This paper shows the fabrication process of the
sub-micron gap in the flow channel which is made by the micro-pillar array formation by Silicon micromachining
technology, and the deposition of poly-Si and successive thermal oxidation. It has become possible to fabricate the
sub-micron order gap and control the gaps by the proposed method. Next, we deposited the ODS (octadecylsily) in the
flow channel. Finally, using this chip, we performed the principle confirmation experiment of ODS deposition effect by
injecting lysozyme into the flow channel. As the result, it was confirmed that the proposed method has the possibility of
the separation analysis of biological samples.