Chika Higashimura
at Nikon Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 November 2019 Paper
Proceedings Volume 11173, 111731K (2019) https://doi.org/10.1117/12.2536388
KEYWORDS: Absorption, Sapphire, Silica, Vacuum ultraviolet, Laser irradiation, Transmittance, Magnesium fluoride, Diffractive optical elements, Ultraviolet radiation

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