Chin-Boon Tan
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Diffraction, Optical lithography, Polarization, Reflection, Silicon, Ray tracing, Solids, Optical alignment, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Sensors, Metals, Scanners, Optical alignment, Scanning probe microscopy, Semiconducting wafers, Signal detection, Overlay metrology, Chemical mechanical planarization, Back end of line

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