Chin-Fu Kuo
at National Chiao Tung Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Switching, Optical fabrication equipment, Micromirrors, Digital micromirror devices, Optical switching, Optics manufacturing, Instrument modeling

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