Chin Khang Tew
at A*STAR Institute of Microelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2024 Presentation + Paper
Proceedings Volume 12898, 1289802 (2024) https://doi.org/10.1117/12.3002146
KEYWORDS: Silicon nitride, Waveguides, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Silicon photonics, Film thickness, Fabrication, Chemical mechanical planarization, Photonic integrated circuits

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top