Chin-Teong Lim
SPIE Involvement:
Publications (11)

Proceedings Article | 29 October 2014 Paper
Proceedings Volume 9235, 92351U (2014)
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Optical proximity correction, Photomasks, Printing, Calibration, Feedback loops, Metrology, Scanning electron microscopy, Image processing

Proceedings Article | 12 April 2013 Paper
GuoXiang Ning, Paul Ackmann, Huifeng Koh, Frank Richter, Matthias Ruhm, Jens Busch, Norman Chen, Karin Kurth , Andre Leschok, Chin Teong Lim
Proceedings Volume 8683, 86831R (2013)
KEYWORDS: Scanners, Semiconducting wafers, Optical proximity correction, Critical dimension metrology, Metals, Reticles, Photomasks, Tolerancing, Calibration, Binary data

Proceedings Article | 8 November 2012 Paper
GuoXiang Ning, Christian Buergel, Paul Ackmann, Marc Staples, Thomas Thamm, Chin Teong Lim, Andre Leschok, Stefan Roling, Anthony Zhou, Fang Hong Gn, Frank Richter
Proceedings Volume 8522, 85222J (2012)
KEYWORDS: Reticles, Semiconducting wafers, Critical dimension metrology, Optical proximity correction, Metals, Manufacturing, Electron beams, Etching, Binary data, Neodymium

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 797322 (2011)
KEYWORDS: Optical proximity correction, Source mask optimization, Scanners, Lithography, Photomasks, Manufacturing, Photovoltaics, Fiber optic illuminators, Reticles, Resolution enhancement technologies

Proceedings Article | 4 March 2010 Paper
Jens Schneider, Andreas Greiner, ChinTeong Lim, Vlad Temchenko, Felix Braun, Dieter Kaiser, Tarja Hauck, Ingo Meusel, Dietrich Burmeister, Stephan Loehr, Susanne Volkland, Astrid Bauch, Hendrik Kirbach, Daniel Sarlette, Katrin Thiede
Proceedings Volume 7640, 76403G (2010)
KEYWORDS: Resolution enhancement technologies, Lithography, Optical proximity correction, Semiconducting wafers, Image processing, 193nm lithography, Chemical reactions, Scanners, Etching, Design for manufacturing

Showing 5 of 11 publications
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