Ching-Chen Tu
at National Tsing Hua Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5719, MOEMS and Miniaturized Systems V
KEYWORDS: Actuators, Oxides, Mirrors, Switching, Etching, Silicon, Micromirrors, Deep reactive ion etching, Optical switching, Semiconducting wafers

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