Dr. Ching-Hsu Chang
Principal Engineer at United Microelectronics Corp
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Mathematical modeling, Stars, Data modeling, Scanners, Solids

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Thin films, Metrology, Data modeling, Calibration, Image processing, Error analysis, Image acquisition, Optical proximity correction, Photoresist processing, Process modeling

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Monochromatic aberrations, Reticles, Scanning electron microscopy, Image transmission, Transmittance, Photomasks, Critical dimension metrology, Binary data, Phase shifts

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Image processing, Printing, Finite element methods, Microelectronics, Photomasks, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 14 September 2001
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Lithography, Optical lithography, Etching, Polymers, Image processing, Dielectrics, Coating, Reflectivity, Critical dimension metrology, Photoresist processing

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