Dr. Ching-Liang Dai
Associate Professor at National Chung Hsing Univ
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Actuators, Capacitors, Etching, Electrodes, Metals, Dielectrics, Silicon, Capacitance, Reactive ion etching

Proceedings Article | 16 August 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Mirrors, Switches, Switching, Silica, Etching, Metals, Micromirrors, Micromachining, Demultiplexers

Proceedings Article | 16 August 2001
Proc. SPIE. 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS
KEYWORDS: Microelectromechanical systems, CMOS sensors, Capacitors, Sensors, Etching, Metals, Silicon, Analog electronics, Digital electronics, Device simulation

Proceedings Article | 11 July 2000
Proc. SPIE. 4078, Optoelectronic Materials and Devices II
KEYWORDS: Microelectromechanical systems, Actuators, Diffraction, Modulation, Etching, Metals, Modulators, Optical switching, Optical modulators, Diffraction gratings

Proceedings Article | 11 July 2000
Proc. SPIE. 4078, Optoelectronic Materials and Devices II
KEYWORDS: Diffraction, Optical design, Diffractive optical elements, Silica, Etching, Metals, Microelectronics, Photomasks, Microfabrication, Diffraction gratings

Showing 5 of 6 publications
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