Ching-Yu Chang
Deputy Director at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Publications (16)

Proceedings Article | 13 March 2018 Paper
Ping-Jui Wu, Yu-Fu Wang, Wei-Chi Chen, Chien-Wei Wang, Joy Cheng, Vencent Chang, Ching-Yu Chang, John Lin, Yuan-Chung Cheng
Proceedings Volume 10586, 105861O (2018)
KEYWORDS: Extreme ultraviolet, Systems modeling, Monte Carlo methods, Polymers, Molecules, Oxygen, Diffusion, Chemical species, Extreme ultraviolet lithography, Ions

Proceedings Article | 13 March 2018 Paper
Ming-Hui Weng, Tsung-Han Ko, Chih-Jie Lee, Han-Ping Shen, Chieh-Han Wu, Ken-Hsien Hsieh, Yuan-Chien Huang, Cheng-Han Wu, Chung-Ju Lee, Ching-Yu Chang, Chin-Hsiang Lin
Proceedings Volume 10586, 105861D (2018)
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Etching, Scanning electron microscopy, Oxides, Optical lithography, Double patterning technology, Bridges, Polymers

Proceedings Article | 27 March 2014 Paper
Proceedings Volume 9051, 90511Y (2014)
KEYWORDS: Lithography, Photomasks, Polymers, Semiconducting wafers, Finite element methods, Photoresist processing, Defect inspection, Quantitative analysis, Organic materials, Silicon

Proceedings Article | 29 March 2013 Paper
Wen-Yun Wang, Cheng Han Wu, Yu-Chang Su, Chen-Hao Wu, Ya-Hui Chang, Ching-Yu Chang, Yao-Ching Ku
Proceedings Volume 8682, 86821Y (2013)
KEYWORDS: Coating, Polymers, Lithography, Silicon, Photoresist processing, FT-IR spectroscopy, Diffusion, Prototyping, Chemical analysis, Semiconductor manufacturing

Proceedings Article | 19 March 2012 Paper
S. Chen, L. Chang, Y. Chang, C. Huang, C. Chang, Y. Ku
Proceedings Volume 8325, 83250O (2012)
KEYWORDS: Polymers, Diffusion, Line width roughness, Optics manufacturing, Scattering, Printing, Semiconductor manufacturing, Resolution enhancement technologies, Inspection, Immersion lithography

Showing 5 of 16 publications
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