Mr. Ching-Yueh Wang Profile

Ching-Yueh Wang

at KLA-Tencor Taiwan

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 3 April 2012 Paper

Recess gate process control by using 3D SCD in 3xm vertical DRAM

Ming-Feng Kuo, Sheng-Hung Wu, Tien-Hung Lan, Shuang Hsun Chang, Elvis Wang, Houssam Chouaib, Harvey Cheng, Qiang Zhao

Proceedings Volume 8324, 83241Z (2012) https://doi.org/10.1117/12.916143

KEYWORDS: Silicon, Single crystal X-ray diffraction, Etching, 3D metrology, 3D modeling, Process control, Scatterometry, Metrology, Data modeling, Semiconducting wafers

Read Abstract +

Proceedings Article | 20 April 2011 Paper

Metrology of micro-step height structures using 3D scatterometry in 4x-nm advance DRAM

Mason Duan, Clark Chen, Calvin Hsu, Elvis Wang, ZhiQing Xu, Elsie Yu, Qiongyan Yuan, Sungchul Yoo, Zhengquan Tan

Proceedings Volume 7971, 79712J (2011) https://doi.org/10.1117/12.881322

KEYWORDS: Single crystal X-ray diffraction, Atomic force microscopy, Scatterometry, Metrology, Etching, 3D metrology, Chemical mechanical planarization, Optical lithography, Oxides, Process control

Read Abstract +

Proceedings Article | 2 April 2010 Paper

Detection of photo resist residue on advanced gate layers using optical scattering and advanced analysis techniques

Scott Ku, Ying-Hsueh Chang Chien, C. Yang, Elvis Wang, Damian Chen, Chris Young, Kevin Sun, Jack Yan, Prasanna Dighe, Avinash Saldanha, David Feiler

Proceedings Volume 7638, 76383F (2010) https://doi.org/10.1117/12.847797

KEYWORDS: Semiconducting wafers, Luminescence, Air contamination, Scattering, Wafer-level optics, Process control, Metrology, Inspection, Metals, Signal attenuation

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years