Mr. Ching-Hsiang Hsu Profile

Ching-Hsiang Hsu

at GLOBALFOUNDRIES Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper

Accuracy improvement in advance lithography focus control

Chris Hsu, Dongyue Yang, Cassidy Dineen, Xueli Hao, Young Ki Kim, Poya Hsu, Bradley Morgenfeld

Proceedings Volume 11327, 113270O (2020) https://doi.org/10.1117/12.2551904

KEYWORDS: Semiconducting wafers, Lithography, Critical dimension metrology, Diffraction, Scanners, Yield improvement, High volume manufacturing, Metrology, Wafer-level optics, Process control

Read Abstract +

Proceedings Article | 2 April 2014 Paper

Lithography focus/exposure control and corrections to improve CDU at post etch step

Young Ki Kim, Mark Yelverton, John Tristan, Joungchel Lee, Karsten Gutjahr, Ching-Hsiang Hsu, Hong Wei, Lester Wang, Chen Li, Lokesh Subramany, Woong Jae Chung, Jeong Soo Kim, Vidya Ramanathan, LipKong Yap, Jie Gao, Ram Karur-Shanmugam, Anna Golotsvan, Pedro Herrera, Kevin Huang, Bill Pierson

Proceedings Volume 9050, 90501Y (2014) https://doi.org/10.1117/12.2045433

KEYWORDS: Semiconducting wafers, Etching, Lithography, Finite element methods, Scatterometry, Critical dimension metrology, Factory automation, Scanners, High volume manufacturing, Scatter measurement

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years