Ching-Hsiang Hsu
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Wafer-level optics, Lithography, Diffraction, Metrology, Scanners, Process control, High volume manufacturing, Critical dimension metrology, Semiconducting wafers, Yield improvement

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Lithography, Etching, Scanners, Scatterometry, Finite element methods, Factory automation, High volume manufacturing, Critical dimension metrology, Semiconducting wafers, Scatter measurement

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