Chiung-I Lee
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | July 1, 2010
JM3 Vol. 9 Issue 03
KEYWORDS: Switches, Microelectromechanical systems, Actuators, Switching, Semiconductors, Capacitance, Dielectrics, Etching, Metals, Standards development

PROCEEDINGS ARTICLE | December 30, 2008
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Microelectromechanical systems, Actuators, Switches, Switching, Signal attenuation, Dielectrics, Silicon, Resistance, Capacitance, Microwave radiation

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