Chloé Hégaret
at STMicroelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 October 2011 Paper
Lionel Ravel, Christophe Brault, Chloé Hegaret, Antonio Di Giacomo, Romain Lallement, Jérôme Azémar, Marie Hellion
Proceedings Volume 8166, 81663J (2011) https://doi.org/10.1117/12.896827
KEYWORDS: Transistors, Critical dimension metrology, Photomasks, Lithography, Optical proximity correction, Etching, Reflectivity, Photoresist materials, Semiconducting wafers, Scanning electron microscopy

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top