Ms. Chongxiang Li
PhD Student at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | August 17, 2004
Proc. SPIE. 5458, Optical Micro- and Nanometrology in Manufacturing Technology
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Silicon, Inspection, 3D metrology, Photomasks, Optical alignment, Semiconducting wafers, Anisotropic etching

PROCEEDINGS ARTICLE | September 4, 2002
Proc. SPIE. 4768, Novel Optical Systems Design and Optimization V
KEYWORDS: Confocal microscopy, Light sources, Imaging systems, Stereoscopy, Error analysis, Inspection, Image resolution, 3D modeling, 3D metrology, Light

PROCEEDINGS ARTICLE | September 4, 2002
Proc. SPIE. 4768, Novel Optical Systems Design and Optimization V
KEYWORDS: Confocal microscopy, Optical fibers, Light sources, Imaging systems, Sensors, Inspection, 3D metrology, Fiber couplers, Signal detection, 3D image processing

PROCEEDINGS ARTICLE | June 20, 2002
Proc. SPIE. 4777, Interferometry XI: Techniques and Analysis
KEYWORDS: Signal to noise ratio, Optical signal processing, Doppler effect, Sensors, Particles, Light scattering, Signal processing, Laser Doppler velocimetry, Velocity measurements, Signal detection

PROCEEDINGS ARTICLE | October 30, 2001
Proc. SPIE. 4596, Advanced Photonic Sensors and Applications II
KEYWORDS: Confocal microscopy, Photodetectors, Light sources, Sensors, Interferometry, Semiconductor lasers, 3D metrology, Fiber couplers, Spatial resolution, 3D image processing

PROCEEDINGS ARTICLE | May 8, 2001
Proc. SPIE. 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
KEYWORDS: Moire patterns, Fringe analysis, Interferometers, Scanners, Interferometry, Atomic force microscopy, Electronic components, Deflectometry, Collimation, Atomic force microscope

Showing 5 of 6 publications
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