Chris Bayliss
at Unaxis Nimbus Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 September 2004
Proc. SPIE. 5380, Optical Data Storage 2004
KEYWORDS: Electron beams, Prototyping, Dynamical systems, Scanning electron microscopy, Electromagnetism, Chemically amplified resists, Reflectivity, Diffusion, Control systems, Objectives

Proceedings Article | 10 January 2002
Proc. SPIE. 4342, Optical Data Storage 2001
KEYWORDS: Electron beams, Photoresist processing, Data storage, Optical discs, Control systems, Modulation, Process control, Vibration isolation, Earthquakes, Patents

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