Chris Marotta
Product Marketing Engineer at Thermo Fisher Scientific Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 March 2002
Proc. SPIE. 4562, 21st Annual BACUS Symposium on Photomask Technology
KEYWORDS: Carbon, Opacity, Quartz, Atomic force microscopy, Scanning electron microscopy, Ion beams, Transmittance, Photomasks, Molybdenum, Phase shifts

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