Mr. Chris Park
President at Nextin Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Mirrors, Metrology, Sensors, Image processing, Microscopy, Optical microscopy, Inspection, Wavefront sensors, Adaptive optics, Semiconducting wafers

PROCEEDINGS ARTICLE | November 24, 2016
Proc. SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV
KEYWORDS: Wafer-level optics, Mirrors, Sensors, Image processing, Optical microscopy, Wavefront sensors, Adaptive optics, Wafer inspection, Optical benches, Semiconducting wafers

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