Mr. Chris Pike Profile

Chris Pike

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Publications (3)

Proceedings Article | 21 July 2000 Paper

Manufacturability of the ultrathin resist process

Christopher Pike, Scott Bell, Marina Plat, Paul King, Khanh Nguyen, Christopher Lyons, Harry Levinson, Khoi Phan, Uzodinma Okoroanyanwu

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390068

KEYWORDS: Photoresist processing, Semiconducting wafers, Scanning electron microscopy, Lithography, Etching, Manufacturing, Silicon, Inspection, Transistors, Photoresist materials

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Proceedings Article | 2 June 2000 Paper

Process-induced defects in sub-0.15-nm device patterning using 193-nm lithography

Uzodinma Okoroanyanwu, Christopher Pike, Harry Levinson

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386482

KEYWORDS: Photoresist processing, Polymers, Photoresist materials, Semiconducting wafers, Lithography, Scanning electron microscopy, Photoresist developing, Optical lithography, Coating, Defect inspection

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Proceedings Article | 2 June 2000 Paper

Defects and metrology of ultrathin resist films

Uzodinma Okoroanyanwu, Jonathan Cobb, Paul Dentinger, Craig Henderson, Veena Rao, Kevin Monahan, David Luo, Christopher Pike

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386506

KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Particles, Confocal microscopy, Coating, Metrology, Microscopes, Polymers, Defect detection, Air contamination

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