Chris J. Robinson
at Sandia National Labs
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Nanotechnology, Immersion lithography, Water, Lithography, Semiconductors, Semiconducting wafers, Photoresist developing, Thin film coatings, Scanners, Photoresist materials

Proceedings Article | 23 January 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Photomasks, Computer aided design, Spectroscopy, Prototyping, Manufacturing, Integrated optics, Microfabrication, Solids, Optical mounts, Solid modeling

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top