Dr. Chris M. Sparks
Analytical Specialist at SVTC Technologies LLC
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 July 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Lithography, Contamination, Statistical analysis, Metals, Copper, Silicon, Aluminum, Chemical analysis, Semiconducting wafers, Hybrid fiber optics

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