Dr. Christelle Charpin-Nicolle Profile

Dr. Christelle Charpin-Nicolle

Research Engineer at CEA-LETI

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Publications (3)

Proceedings Article | 1 April 2008 Paper

Integration issues in step and repeat UV nanoimprint lithography

C. Charpin-Nicolle, M. Irmscher, M. Pritschow, B. Vratzov, H. van Vossen, J. Chiaroni, J. Massin, P. Gubbini

Proceedings Volume 6921, 69212I (2008) https://doi.org/10.1117/12.790732

KEYWORDS: Etching, Nanoimprint lithography, Plasma, Semiconducting wafers, Silicon, Chlorine, Scanning electron microscopy, Chromium, Ultraviolet radiation, Optical alignment

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Proceedings Article | 7 March 2008 Paper

Contrast management of 193i interferometry to be close to scanners contrast conditions

Alexandre Lagrange, Philippe Bandelier, Christelle Charpin, Olivier Lartigue

Proceedings Volume 6924, 69242G (2008) https://doi.org/10.1117/12.772584

KEYWORDS: Nanoimprint lithography, Critical dimension metrology, Interferometers, Scanners, Interferometry, Lithography, Image processing, Photoresist materials, Modulation, Semiconducting wafers

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Proceedings Article | 6 December 2004 Paper

A new absorbing stack for EUV masks

Christelle Charpin Nicolle, Vincent Farys, Beatrice Biasse, Jean-Francois Damlencourt, Jean Yves Robic

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.569266

KEYWORDS: Reflectivity, Extreme ultraviolet, Silicon, Deep ultraviolet, Etching, Annealing, Photomasks, Wet etching, EUV optics, Molybdenum

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