Dr. Christelle Charpin-Nicolle
Research Engineer at CEA-LETI
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 April 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Etching, Ultraviolet radiation, Silicon, Chromium, Scanning electron microscopy, Nanoimprint lithography, Optical alignment, Chlorine, Semiconducting wafers, Plasma

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Modulation, Interferometers, Image processing, Scanners, Interferometry, Photoresist materials, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Deep ultraviolet, Etching, Annealing, Silicon, Reflectivity, Photomasks, Extreme ultraviolet, Wet etching, Molybdenum, EUV optics

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