Mr. Christer Rydberg Profile

Christer Rydberg

Lithography Engineer at Micronic Laser Systems AB

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Author

Publications (3)

Proceedings Article | 27 March 2007 Paper

Sources and scaling laws for LER and LWR

Tor Sandstrom, Christer Rydberg

Proceedings Volume 6520, 65200X (2007) https://doi.org/10.1117/12.712248

KEYWORDS: Line edge roughness, Speckle, Metrology, Line width roughness, Optical filters, Fiber optic illuminators, Molecules, Transistors, Photomasks, Speckle pattern

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SPIE Journal Paper | 1 July 2006

Dynamic laser speckle as a detrimental phenomenon in optical projection lithography

Christer Rydberg, Jorgen Bengtsson, Torbjorn Sandström

JM3, Vol. 5, Issue 03, 033004, (July 2006) https://doi.org/10.1117/12.10.1117/1.2242524

KEYWORDS: Speckle, Line edge roughness, Nanoimprint lithography, Lithography, Excimer lasers, Stochastic processes, Spatial coherence, Fiber optic illuminators, Projection lithography, Optical lithography

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Proceedings Article | 12 May 2005 Paper

Dynamic laser speckle in optical projection lithography: causes, effects on CDU and LER, and possible remedies

Tor Sandstrom, Christer Rydberg, Jorgen Bengtsson

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.597748

KEYWORDS: Speckle, Line edge roughness, Lithography, Nanoimprint lithography, Photomasks, Excimer lasers, Stochastic processes, Fiber optic illuminators, Temporal coherence, Projection lithography

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