Dr. Christiaan Baert
at imec
SPIE Involvement:
Conference Program Committee | Author
Publications (11)

Proceedings Article | 19 August 2010
Proc. SPIE. 7773, Reliability of Photovoltaic Cells, Modules, Components, and Systems III
KEYWORDS: Glasses, Solar cells, Crystals, Silicon, Coating, Reliability, Laser drilling, Silicon solar cells, Adhesives, Failure analysis

Proceedings Article | 22 January 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Packaging, Microbolometers, Thin films, Resonators, Sensors, Spectroscopy, Reliability, Semiconducting wafers, Liquids

Proceedings Article | 30 December 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Microelectromechanical systems, Crystals, Germanium, Silicon, Chemical vapor deposition, Scanning electron microscopy, Transmission electron microscopy, Profilometers, Plasma enhanced chemical vapor deposition, Plasma

Proceedings Article | 25 August 2000
Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI
KEYWORDS: Oxides, Etching, Metals, Semiconducting wafers, HF etching, Vapor etching

Proceedings Article | 30 August 1999
Proc. SPIE. 3874, Micromachining and Microfabrication Process Technology V
KEYWORDS: Chemical species, Electrodes, Metals, Dielectrics, Silicon, Photoresist materials, Aluminum, Deep reactive ion etching, Semiconducting wafers, Electroplating

Showing 5 of 11 publications
Conference Committee Involvement (6)
Smart Sensors, Actuators and MEMS
2 May 2007 | Maspalomas, Gran Canaria, Spain
MOEMS and Miniaturized Systems VI
24 January 2007 | San Jose, California, United States
MOEMS Display, Imaging, and Miniaturized Microsystems IV
25 January 2006 | San Jose, California, United States
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
MOEMS and Miniaturized Systems V
25 January 2005 | San Jose, California, United States
Showing 5 of 6 published special sections
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