Christian Ehrlich
International Business Development Manager at Carl Zeiss SMT GmbH
SPIE Involvement:
Publications (13)

Proceedings Article | 16 October 2017 Presentation
Proceedings Volume 10450, 104500E (2017)
KEYWORDS: Extreme ultraviolet, Photomasks, Image registration, Manufacturing, Metrology, Extreme ultraviolet lithography, Overlay metrology, Image restoration, Lithography, Optical parametric oscillators

Proceedings Article | 28 September 2017 Paper
Kristian Schulz, Kokila Egodage, Gilles Tabbone, Christian Ehrlich, Anthony Garetto
Proceedings Volume 10446, 104460I (2017)
KEYWORDS: Scanning electron microscopy, Photomasks, Nanoimprint lithography, Image analysis, Image processing, Image resolution

Proceedings Article | 2 May 2008 Paper
Proceedings Volume 6792, 67920H (2008)
KEYWORDS: Photomasks, Phase shifts, Imaging systems, Electron beams, Opacity, Sensors, Bridges, Inspection, Visualization, Quartz

Proceedings Article | 30 October 2007 Paper
Proceedings Volume 6730, 67301Z (2007)
KEYWORDS: Photomasks, Phase shifts, Electron beams, Imaging systems, Sensors, Phase measurement, Inspection, Opacity, Metrology

Proceedings Article | 21 June 2006 Paper
Christian Ehrlich, Klaus Edinger, Thorsten Hofmann, Wolfgang Degel
Proceedings Volume 6281, 62810M (2006)
KEYWORDS: Photomasks, Electron beams, Phase shifts, Magnesium, Binary data, Quartz, Imaging systems, Etching, Gemini Observatory, Inspection

Showing 5 of 13 publications
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