Dr. Christian Laubis
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Publications (45)

SPIE Journal Paper | 24 January 2024 Open Access
Luisa Sciortino, Marco Barbera, Salvatore Ferruggia Bonura, Michela Todaro, Elena Puccio, Fabio D’Anca, Ugo Lo Cicero, Pekka T. Törmä, Elena Magnano, Silvia Nappini, Igor Píš, Emanuele Perinati, Sebastian Diebold, Alejandro Guzman, Chris Tenzer, Gianpiero Buscarino, Christian Gollwitzer, Evelyn Handick, Michael Krumrey, Christian Laubis, Roberto Candia, Salvatore Varisco
JATIS, Vol. 10, Issue 01, 018002, (January 2024) https://doi.org/10.1117/12.10.1117/1.JATIS.10.1.018002
KEYWORDS: Aluminum, Tunable filters, Silicon, Silicon nitride, X-rays, Optical filters, X-ray photoelectron spectroscopy, Oxides, Ultraviolet radiation, Visible radiation

Proceedings Article | 1 December 2022 Paper
Proceedings Volume 12293, 122930Y (2022) https://doi.org/10.1117/12.2643246
KEYWORDS: Extreme ultraviolet, Scatterometry, Photomasks, Refractive index, Scattering, Reflectivity, Metrology, Databases, Oxidation, Multilayers, Extreme ultraviolet lithography, Extreme ultraviolet coatings, Modeling and simulation, Optical constants, Optical metrology

Proceedings Article | 31 August 2022 Poster + Paper
Proceedings Volume 12181, 121814H (2022) https://doi.org/10.1117/12.2631516
KEYWORDS: Aluminum, X-rays, Pellicles, Transmittance, Oxides, Optical filters, X-ray detectors, Manufacturing

Proceedings Article | 20 March 2020 Paper
Proceedings Volume 11325, 113251D (2020) https://doi.org/10.1117/12.2552037
KEYWORDS: Diffraction, Finite element methods, Scattering, Inverse problems, X-rays

Proceedings Article | 27 June 2019 Paper
Vicky Philipsen, Kim Vu Luong, Karl Opsomer, Laurent Souriau, Jens Rip, Christophe Detavernier, Andreas Erdmann, Peter Evanschitzky, Christian Laubis, Philipp Hönicke, Victor Soltwisch, Eric Hendrickx
Proceedings Volume 11178, 111780F (2019) https://doi.org/10.1117/12.2537967
KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Metals, Plasma etching, Etching, Optical properties

Showing 5 of 45 publications
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