Dr. Christian Laubis
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (39)

PROCEEDINGS ARTICLE | October 10, 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Refractive index, Metals, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Material characterization, Tellurium

PROCEEDINGS ARTICLE | October 9, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Optical components, Mirrors, Reflectivity, Reflectometry, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | July 6, 2018
Proc. SPIE. 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray
KEYWORDS: Telescopes, Mirrors, Cameras, Sensors, Calibration, Interferometry, Frequency modulation, Extreme ultraviolet, Fermium, Optical alignment

PROCEEDINGS ARTICLE | April 23, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Scattering, Scanners, Particles, Silicon, Hydrogen, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Nanostructures, Diffraction, Scattering, Sensors, X-rays, Laser scattering, Scatterometry, Extreme ultraviolet, Charge-coupled devices, Diffraction gratings

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Thin films, Lithography, Metals, X-rays, Nickel, Manufacturing, Cobalt, Photomasks, Extreme ultraviolet, Chemical elements

Showing 5 of 39 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top