Dr. Christian Robert Musil Profile

Dr. Christian Robert Musil

Scientist at FEI Co

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 27 December 2002 Paper

Christian Musil, Diane Stewart, Richard Clark

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467434

KEYWORDS: Quartz, Photomasks, Gallium, Image processing, Chromium, Opacity, Etching, Binary data, Lithography, Light scattering

Proceedings Article | 2 June 2000 Paper

Drew Barnes, Christian Musil, Don Yansen

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386504

KEYWORDS: Ions, Gallium, Metrology, Contamination, Silicon, Photoresist materials, Lithography, Sputter deposition, Modulation, Semiconducting wafers

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases