Dr. Christian Neuber
at Univ Bayreuth
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 21 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Thin films, Lithography, Optical lithography, Silica, Etching, Polymers, Molecules, Crystals, Silicon, Resistance, Scanning probe lithography, Photoresist materials, Physical vapor deposition

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Lithography, Electron beam lithography, Optical lithography, Etching, Glasses, Crystals, Resistance, Scanning probe lithography, Plasma etching

Proceedings Article | 17 March 2015
Proc. SPIE. 9428, Advanced Etch Technology for Nanopatterning IV
KEYWORDS: Lithography, Refractive index, Optical lithography, Etching, Glasses, Surface roughness, Scanning probe lithography, Atomic force microscopy, Photoresist materials, Plasma

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Actuators, Lithography, Electron beam lithography, Optical lithography, Glasses, Scanners, Manufacturing, Control systems, Scanning probe lithography, Software development

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Etching, Polymers, Glasses, Silicon, Resistance, Scanning probe lithography, Photoresist processing

Showing 5 of 8 publications
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