Dr. Christian Peth
at Laser-Lab Göttingen eV
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 31 December 2009
Proc. SPIE. 7504, Laser-Induced Damage in Optical Materials: 2009
KEYWORDS: Gold, Mirrors, Multilayers, Polymethylmethacrylate, Etching, Solids, Objectives, Extreme ultraviolet, EUV optics, Plasma

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Gold, Mirrors, FT-IR spectroscopy, Polymethylmethacrylate, Etching, Polymers, Solids, Objectives, Extreme ultraviolet, Plasma

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Gold, Mirrors, Laser applications, Reflectivity, Wavefronts, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Liquids

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Carbon, Mirrors, Metrology, Sensors, Silicon, Plasmas, Reflectivity, Reflectometry, Extreme ultraviolet, Absorption

Proceedings Article | 30 April 2009
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: Carbon, Mirrors, Reflection, Spectroscopy, X-rays, Laser development, Extreme ultraviolet, Krypton, Plasma, Absorption

Showing 5 of 19 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top