Dr. Christian Peth
at Laser-Lab Göttingen eV
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 31 December 2009 Paper
Proc. SPIE. 7504, Laser-Induced Damage in Optical Materials: 2009
KEYWORDS: Extreme ultraviolet, Mirrors, Gold, Etching, Plasma, Multilayers, Polymethylmethacrylate, EUV optics, Solids, Objectives

Proceedings Article | 18 May 2009 Paper
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Extreme ultraviolet, Polymethylmethacrylate, Etching, Polymers, Gold, Plasma, Mirrors, Solids, Objectives, FT-IR spectroscopy

Proceedings Article | 18 May 2009 Paper
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Extreme ultraviolet, Plasma, Solids, Gold, Mirrors, Wavefronts, Liquids, Laser applications, Reflectivity, Extreme ultraviolet lithography

Proceedings Article | 18 May 2009 Paper
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Extreme ultraviolet, Reflectivity, Carbon, Silicon, Reflectometry, Sensors, Absorption, Metrology, Plasmas, Mirrors

Proceedings Article | 30 April 2009 Paper
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Carbon, Spectroscopy, Reflection, Krypton, Absorption, Laser development, X-rays

Showing 5 of 19 publications
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