Prof. Christoph Hugenschmidt
at Technische Univ München
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 February 2020 Paper
Proceedings Volume 11280, 112800C (2020) https://doi.org/10.1117/12.2541518
KEYWORDS: Magnesium, Gallium nitride, Annealing, Ion implantation, Doppler effect, Ions, Spectroscopy, Semiconductors

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