Dr. Christoph Kappel
Manager Systems & Optics at Nanda Technologies GmbH
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Publications (3)

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Metrology, Logic, Optical lithography, Etching, Image processing, Inspection, Process control, Critical dimension metrology, Neodymium, Semiconducting wafers

PROCEEDINGS ARTICLE | December 20, 2004
Proc. SPIE. 5577, Photonics North 2004: Optical Components and Devices
KEYWORDS: Ultrafast phenomena, Optical filters, Waveguides, Polarization, Reflection, Dispersion, Spectroscopy, Dielectrics, Wave propagation, Pulsed laser operation

PROCEEDINGS ARTICLE | December 9, 2004
Proc. SPIE. 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education
KEYWORDS: Oxides, Modulation, Waveguides, Reflection, Dielectrics, Atomic force microscopy, Laser ablation, Niobium, Diffraction gratings, Absorption

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