Dr. Christoph Meinecke
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 September 2018
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Gold, Electron beam lithography, Two photon polymerization, Etching, Silicon, Chromium, Scanning electron microscopy, Photomasks, Semiconducting wafers, Network architectures

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