Christoph Weichert
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | May 22, 2014
OE Vol. 53 Issue 12
KEYWORDS: Interferometers, Zerodur, Computer programming, Photomasks, Calibration, Metrology, Mirrors, Manufacturing, Microscopes

PROCEEDINGS ARTICLE | June 17, 2009
Proc. SPIE. 7390, Modeling Aspects in Optical Metrology II
KEYWORDS: Sensors, Error analysis, Interferometers, Mirrors, Microscopes, Computer programming, Calibration, Environmental sensing, Virtual reality, Head

PROCEEDINGS ARTICLE | January 12, 2009
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

PROCEEDINGS ARTICLE | October 17, 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Interferometers, Photomasks, Metrology, Mirrors, Computer programming, Calibration, Sensors, Microscopes, Beam splitters, Image registration

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