Dr. Christophe Constancias
at MINATEC
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 9 September 2019
Proc. SPIE. 11088, Optical Sensing, Imaging, and Photon Counting: From X-Rays to THz 2019
KEYWORDS: Mid-IR, Scattering, Sensors, Particles, Silicon, Light scattering, Quantum cascade lasers, Photoacoustic spectroscopy, Acoustics, Absorption

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Point spread functions, Etching, Silicon, 3D modeling, Scanning electron microscopy, Monte Carlo methods, Information technology, Critical dimension metrology

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Silicon, Chemistry, Photoresist materials, Extreme ultraviolet, Line width roughness, Semiconducting wafers, Chemically amplified resists

SPIE Journal Paper | 1 July 2011
JM3 Vol. 10 Issue 03
KEYWORDS: Overlay metrology, Polarimetry, Error analysis, Silicon, Semiconducting wafers, Metrology, Optical testing, Microscopes, Critical dimension metrology, Mueller matrices

Proceedings Article | 20 April 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Microscopes, Metrology, Error analysis, Silicon, Manufacturing, Polarimetry, Optical testing, Critical dimension metrology, Semiconducting wafers, Overlay metrology

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top