Dr. Christophe Peroz
Distinguished Scientist at Sony Corp
SPIE Involvement:
Conference Chair | Editor | Author | Special Event Speaker
Publications (7)

Proceedings Article | 1 September 2015 Paper
Proc. SPIE. 9576, Applied Advanced Optical Metrology Solutions
KEYWORDS: Modulation transfer functions, Binary data, Calibration, Spatial frequencies, Standards development, Optical microscopes, Silicon, Error analysis, Sensors, Optical fabrication

SPIE Journal Paper | 7 August 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Nanoimprint lithography, Integrated optics, Semiconducting wafers, Holograms, Etching, Electron beam lithography, Information operations, Waveguides, Oxygen, Spectroscopes

SPIE Journal Paper | 5 September 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Nanoimprint lithography, Metals, Multilayers, Etching, Polymethylmethacrylate, Optical lithography, Plasma, Ultraviolet radiation, Silicon films, Scanning electron microscopy

Proceedings Article | 10 January 2013 Paper
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Etching, Silicon, Photomasks, Ions, Plasma, Cryogenics, Polymers, Nanoimprint lithography, Silica, Chromium

Proceedings Article | 3 April 2012 Paper
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Scanning electron microscopy, Metrology, Monte Carlo methods, Image analysis, Image quality, Cadmium, Sensors, Line width roughness, Critical dimension metrology, Line edge roughness

Showing 5 of 7 publications
Proceedings Volume Editor (3)

SPIE Conference Volume | 14 April 2020

SPIE Conference Volume | 7 June 2019

Conference Committee Involvement (8)
Digital Optical Technologies 2021
21 June 2021 | Munich, Germany
Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II
28 March 2021 | Online Only, California, United States
Digital Optics for Immersive Displays II (DOID20)
7 April 2020 | Online Only, France
Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR)
2 February 2020 | San Francisco, California, United States
Digital Optical Technologies II
24 June 2019 | Munich, Germany
Showing 5 of 8 Conference Committees
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