Dr. Chris Bencher
at Applied Materials Inc
SPIE Involvement:
Editor | Author
Publications (35)

SPIE Journal Paper | 4 October 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Directed self assembly, Lithography, Electron beam lithography, Extreme ultraviolet lithography, Optical lithography, Extreme ultraviolet, Process control, Integrated circuit design, Nanostructures, Nanoimprint lithography

SPIE Journal Paper | 3 October 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Lithography, Optical lithography, Electron beam lithography, Nanotechnology, Extreme ultraviolet lithography, Photomasks, Integrated circuit design, Double patterning technology, Nanolithography, Directed self assembly

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Signal to noise ratio, Lithography, Metrology, Polarization, Inspection, Wafer inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 27 March 2014 Paper
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Optical lithography, Etching, Silicon, Manufacturing, Reflectivity, Photoresist materials, Double patterning technology, Semiconducting wafers, System on a chip

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Etching, Ions, Photoresist materials, Extreme ultraviolet, Line width roughness, Ion implantation, Plasma etching, Line edge roughness, Semiconducting wafers, Plasma

Showing 5 of 35 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 4 May 2017

SPIE Conference Volume | 5 July 2016

SPIE Conference Volume | 21 April 2015

SPIE Conference Volume | 30 April 2014

Conference Committee Involvement (6)
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Alternative Lithographic Technologies VI
24 February 2014 | San Jose, California, United States
Showing 5 of 6 Conference Committees
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