Dr. Christopher L. Muhlstein
at The Pennsylvania State Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | January 6, 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Oxides, Resonators, Silica, Silicon, Scanning electron microscopy, Silicon films, Humidity, Photomicroscopy, Oxidation

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Oxides, Silicon, Reliability, Silicon films, Humidity, Beam shaping, Photomicroscopy, Protactinium, Oxidation

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III
KEYWORDS: Microelectromechanical systems, Oxides, Thin films, Mechanics, Crystals, Interfaces, Silicon, Silicon films, Failure analysis, Oxidation

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