Christopher Ordonio
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Etching, Line edge roughness, Photoresist processing, 193nm lithography

PROCEEDINGS ARTICLE | March 27, 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Data modeling, Etching, Scanning electron microscopy, Photomasks, Double patterning technology, Optical proximity correction, Neodymium, Semiconducting wafers, Resolution enhancement technologies

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