Dr. Christopher J. Orendorff
at Sandia National Labs
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 9, 2008
Proc. SPIE. 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V
KEYWORDS: Lithography, Metals, Particles, Indium, Silicon, Chemistry, Scanning electron microscopy, Photoresist materials, Photomasks, Semiconducting wafers

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