Dr. Christopher I. Pakes
at Univ of Melbourne
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Sensors, Electrodes, X-rays, Ions, Silicon, Capacitance, Ionization, Ion implantation, Molybdenum, Acoustics

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Oxides, Sensors, Chemical species, Electrodes, Ions, Silicon, Diffusion, Photomasks, Phosphorus, Quantum communications

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Oxides, Sensors, Electrodes, X-rays, Ions, Silicon, Ion implantation, Signal detection, Quantum communications, Quantum computing

PROCEEDINGS ARTICLE | November 21, 2001
Proc. SPIE. 4591, Electronics and Structures for MEMS II
KEYWORDS: Oxides, Electrons, Ions, Silicon, Magnetism, Control systems, TCAD, Systems modeling, Quantum communications, Quantum computing

PROCEEDINGS ARTICLE | November 19, 2001
Proc. SPIE. 4590, BioMEMS and Smart Nanostructures
KEYWORDS: Fabrication, Thin films, Polymethylmethacrylate, Etching, Ions, Silicon, Atomic force microscopy, Nanolithography, Quantum computing, Carbon nanotubes

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