Dr. Chris A. Spence
VP Advanced Technology Development at ASML San Jose
SPIE Involvement:
Conference Program Committee | Author
Publications (44)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Optical lithography, Silica, Manufacturing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Stochastic processes, System on a chip, Plasma treatment

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Lithography, Photomasks, Optical proximity correction, SRAF, Mask making, Process modeling

PROCEEDINGS ARTICLE | April 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Signal to noise ratio, Metrology, Optical lithography, Data modeling, Calibration, Metals, Image analysis, Optical proximity correction, OLE for process control, Instrument modeling

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Metrology, Optical lithography, Scanners, Control systems, Process control, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Immersion lithography, Logic devices, Optical proximity correction, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Scanners, Photomasks, Optical proximity correction, Semiconducting wafers, Overlay metrology, Process modeling

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Lithography, Reticles, Metrology, Optical lithography, Data modeling, Scanners, Inspection, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers

Showing 5 of 44 publications
Conference Committee Involvement (3)
Photomask Technology
15 September 2009 | Monterey, California, United States
Photomask Technology
7 October 2008 | Monterey, California, United States
Photomask Technology
18 September 2007 | Monterey, California, United States
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